Applications of Vapor-Liquid-Solid Selective Epitaxy of Highly p-Type Doped 4H-SiC: PiN Diodes with Peripheral Protection and Improvement of Specific Contact Resistance of Ohmic Contacts Auteur(s): Thierry-Jebali Nicolas, Lazar Mihai, Vo-Ha Arthur, Carole Davy, Soulière Véronique, Henry Anne, Planson Dominique, Ferro Gabriel, Konczewicz L., Contreras S., Brylinski Christian, Brosselard Pierre
Conference: CSCRM (Miyazaki, JP, 2013-09-29) |