Auteur(s): Arvinte Roxana, Zielinski Marcin, Chassagne Thierry, Portail Marc, Michon Adrien, Kwasnicki P., Juillaguet S., Peyre H.
Conference: 10th European Conference on Silicon Carbide and Related Materials (Grenoble, FR, 2014-09)
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Influence of Site Competition Effects on Dopant Incorporation during Chemical Vapor Deposition of 4H-SiC Epitaxial Layers Auteur(s): Arvinte Roxana, Zielinski Marcin, Chassagne Thierry, Portail Marc, Michon Adrien, Kwasnicki P., Juillaguet S., Peyre H.
Conference: 10th European Conference on Silicon Carbide and Related Materials (Grenoble, FR, 2014-09) |