Visible light laser irradiation: A tool for implantation damage reduction Auteur(s): Camassel J., Peyre H., Brink D. J., Zielinski Marcin, Blanqué Servane, Mestres N., Godignon Philippe
Conference: 10th International Conference on Silicon Carbide and Related Materials (ICSCRM2003) (Lyon, FR, 2003-10-05) |