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- Control of 3C-SiC/Si wafer bending by the "checker-board" carbonization method doi link

Auteur(s): Chassagne Thierry, Ferro Gabriel, Haas H., Mank H., Leycuras André, Monteil Yves, Soares Fillip, Balloud Carole, Arcade P., Blanc C., Peyre H., Juillaguet S., Camassel J.

Conference: International Workshop on Expert Evaluation & Control of Compound Semiconductor Materials & Technologies (EXMATEC 2004) (MONTPELLIER, FR, 2004-06-01)
Actes de conférence: Physica status solidi. A. Applied research, vol. 202 p.524-530 (2005)
Texte intégral en Openaccess : istex