Control of 3C-SiC/Si wafer bending by the "checker-board" carbonization method Auteur(s): Chassagne Thierry, Ferro Gabriel, Haas H., Mank H., Leycuras André, Monteil Yves, Soares Fillip, Balloud Carole, Arcade P., Blanc C., Peyre H., Juillaguet S., Camassel J.
Conference: International Workshop on Expert Evaluation & Control of Compound Semiconductor Materials & Technologies (EXMATEC 2004) (MONTPELLIER, FR, 2004-06-01) Ref HAL: hal-00389901_v1 DOI: 10.1002/pssa.200460415 WoS: 000228522300010 Exporter : BibTex | endNote 18 Citations |