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- Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers doi link

Auteur(s): Arvinte Roxana, Zielinski Marc, Chassagne Thierry, Portail Marc, Michon Adrien, Kwasnicki P., Juillaguet S., Peyre H.

Conference: HETEROSIC 2013 (Nice, FR, 2013-06-13)


Ref HAL: hal-01936612_v1
DOI: 10.4028/www.scientific.net/MSF.806.45
Exporter : BibTex | endNote
Résumé:

Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers