Sommaire:

In general, single-walled carbon nanotubes (SWCNTs) are synthesized by
chemical vapor deposition (CVD) at 700-900ºC using Fe, Co and Ni catalysts. However,
due to Ostwald ripening of catalyst particles, the uniformity of the SWCNT diameter is
not sufficient, which is not preferable for electronics applications. In addition, reduction
of the growth temperature is desired for realization of SWCNT devices compatible with
LSI manufacturing processes. In this study, we performed SWCNT growth by alcohol
catalytic CVD using platinum-group metal catalysts (Ru, Rh and Pt), since these metals
have high-melting points (> 1700ºC), and reduction of Ostwald ripening is expected. By
optimizing the growth condition, SWCNTs were grown from these catalysts at the growth
temperature between 500 and 700ºC. Irrespective of the catalyst metals, the diameter and
chirality distribution became narrower, as the growth temperature decreased. In particular,
the diameters of most SWCNTs grown from Pt catalysts were below 1 nm and their
diameter distribution was quite narrow [1]. On the other hand, SWCNTs were grown from
Rh catalysts even at 300ºC, which is the lowest temperature record of SWCNT growth
[2]. We will also discuss growth mechanism of SWCNTs from these platinum-group
metal catalysts.
[1] T. Maruyama et al. Carbon 96 (2016) 6.
[2] T. Maruyama et al. Carbon 116 (2017) 128.

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