Auteur(s): Constant Aurore, Camara N., Godignon Philippe, Camassel J., Decams J.M.
Conference: International workshop on 3C-SiC hetero-epitaxy (HeteroSiC '09) (Catane, IT, 2009)
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Rapid thermal oxidation of 3C- and 4H-SiC using in-situ thermal cycling in nitrogen Auteur(s): Constant Aurore, Camara N., Godignon Philippe, Camassel J., Decams J.M.
Conference: International workshop on 3C-SiC hetero-epitaxy (HeteroSiC '09) (Catane, IT, 2009) |