Auteur(s): Zielinski Marcin, Chassagne Thierry, Arvinte Roxana, Michon Adrien, Portail Marc, Contreras S., Juillaguet S., Peyre H.
Conference: 11th European Conference on Silicon Carbide and Related Materials (Thessaloniki, GR, 2016-09)
Actes de conférence: Material Sciences Forum, vol. 897 p.79 (2017)
Ref HAL: hal-01935556_v1
Exporter : BibTex | endNote
Résumé:
Influence of Growth Temperature on Site Competition Effects During Chemical Vapor Deposition of 4H-SiC Layers